Ihara Science High Flow Diaphram Valve

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ESI Technologies Group / Products / Valve & Actuation / Ihara Science High Flow Diaphragm Valve (HFD)

Product

Ihara Science High Flow Diaphragm Valve (HFD)

Ihara Science HFD series high flow metal diaphragm control valve for Ultra High Purity (UHP) bulk gas systems and point of use applications.  The HFD diaphragm valve offers exceptional cleanliness and excellent flows for gas distribution systems.  Superior containment and delivery for the most critical gas applications.  Manual and automatic operations available: pneumatic, double-acting and lock out tag out handle.

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Product Benefits

  • Engineered with less dead space around wetted surfaces, providing excellent gas purging ability.
  • Mounted Ni-Co alloy diaphragm which achieves high air-tightness and high durability and actuation longevity
  • Equipped with open/close indicator allowing visual check of the valve position. LOTO integral safety handle available
  • Oil-free treatment by precision cleaning for all wetted parts & detailed electropolishing procedure for outstanding finish
  • Assembled, tested and packaged in ISO5 (class 100) cleanroom, double-bagged with UHP Nitrogen purge

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HFD Data Sheet

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